|
A Review on Application of Interdigital Capacitors in the Capacitive Sensors
|
| |
|
|
|
Abstract: (1141 Views) |
| Sensor is a device that converts signals from one physical energy domain to electrical domain. Capacitive sensors have gain lots of attention because of their good performance, excellent sensitivity, easy-to-use principles, ease of manufacturing, etc. Due to the growing demand for the integrated on-chip electronic systems and need for the sensor downscaling, interdigital capacitor type of the sensors has become increasingly popular. These capacitors are the most common used capacitor structures in the micro electro-mechanical systems and are multi-finger periodic structures on an insulating substrate. Sensitivity and capacitance of the IDTs are relatively higher in comparison with the other capacitors that makes them to an attractive candidate in the sensor applications. This study reviews application of IDTs in the capacitive sensors. |
|
| Keywords: Interdigital capacitor, Capacitive sensors, MEMS. |
|
|
Full-Text [PDF 5199 kb]
(249 Downloads)
|
Type of Study: Scientific-extension |
Subject:
Special
Received: 2021/08/2 | Accepted: 2021/08/1 | Published: 2021/08/1
|
|
|
|
|
|
